In-plane characterization of PZT thin films for the creation of a general impedance model
نویسندگان
چکیده
The in-plane dielectric and ferroelectric properties of preferentially oriented lead zirconate titanate (PZT) thin films are characterized using interdigitated transducers (IDTs). By combining finite element method simulations capacitance measurements, values the constant with thicknesses between 150 nm 800 obtained. A modified Sawyer–Tower circuit is used to investigate polarization loops measured IDT electrodes. well-defined hysteresis loop obtained demonstrating switching domains. Leakage current measurements reveal high resistivity an indication quality PZT film. characteristics determine total impedance IDT-PZT structure. Here, structure represented by equivalent ladder inductance resistance electrodes conductance matches low frequency measurements.
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2021
ISSN: ['1089-7550', '0021-8979', '1520-8850']
DOI: https://doi.org/10.1063/5.0039601